The processing of semiconductors for the microelectronic industry remains an example of a discipline for which technology is leading science. There is a growing demand by the industry for processes which can yield components which are smaller, more densely packed and capable of greater electronic speed. The critical processes which limit development in this area are fine line anisotropic etching and the passivation of surfaces and interfaces. In response to these needs several processes which could be important to future developments in this technology are being studied
